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FOX -Field Oxide LOCOS - LOCal Oxidation of Silicon STI -Shallow Trench Isolation Lecture 2:Process and Layout Page 10/64 The LOCOS Process has two problems: » Bird’s Beak makes it hard to make transistors close to each other. » A parasitic MOSFET can turn on underneath the FOX. Solution: Shallow Trench Isolation (STI) and Field Implants